Products and Applications
SiC Carrier plate
- RTP/RTA Carrier Plate: Used in semiconductor processes for rapid heating and cooling thermal treatment processes such as annealing, doping, and oxidation. HuaCera® silicon carbide RTP/RTA carrier plates have high purity, high temperature resistance, good thermal stability, and excellent temperature uniformity, ensuring uniform heating of wafers during annealing and reducing the occurrence of wafer breakage.
- PVD Carrier Plate: Used in aluminum nitride coating processes for LED production. HuaCera® silicon carbide PVD carrier plates feature high purity, high hardness and wear resistance, high specific stiffness, excellent thermal conductivity, good thermal shock resistance, excellent temperature uniformity, and long service life.
- CMP Carrier Plate is a key component in semiconductor manufacturing processes, especially suitable for chemical mechanical polishing (CMP) of SiC wafers. HuaCera® silicon carbide CMP carrier plates fully utilize the excellent thermal conductivity, high hardness, low thermal expansion, and chemical resistance of silicon carbide ceramics. HuaCera® silicon carbide CMP carrier plates have fine and uniform grains, high density, high purity, high surface accuracy, and long service life.
