The key to determining the characteristics of silicon carbide materials lies in their microstructure. Huashuo Advaced Ceramics' sintered silicon carbide materials are carefully developed and designed, with a density >3.15g/cc, fine and uniform grains, and an average grain size <10um.

Characteristics of HuaCera® sintered silicon carbide materials:

• Mechanical properties: low density, high strength, high stiffness, high elastic modulus, high hardness, excellent wear resistance.
• Thermal properties: high thermal conductivity, low thermal expansion, excellent thermal shock resistance.
• Chemical properties: SiC content>99%, purity>99.9%; resistant to various strong acids, strong alkalis, and oxidizers, resistant to plasma corrosion.
• Electrical properties: volume resistivity between 106 and 108 ohms, compliant with anti-ESD standards.
  Optical processing properties: extremely low porosity, fine and uniform grains, surface roughness <1nm (RMS) after optical polishing.

Enables lightweight design and can build integrated internal cooling structures, far surpassing alumina, glass-ceramics, and other types of silicon carbide, making it an ideal material choice for ultra-high precision semiconductor equipment components.

Main application products of HuaCera® silicon carbide materials in semiconductor equipment include: wafer chucks, precision structural components (guide rails, platforms, bases, mirrors), carrier plates, robotic arms, and other structural parts; also high-temperature SiC furnace tubes.

Advantages of Huashuo Advanced Ceramics

• Mastering of sintered silicon carbide material technology.
• Ultra-lightweight capability, with minimum thickness down to 1mm.
• Precision machining and inspection capabilities for silicon carbide ceramics.
• Large size chuck manufacturing capability - 300mm and above.
• SiC/SiC or SiC/metal assembly capability, capable of producing complex shapes: ceramic welding, epoxy resin bonding, bolt connections.
• Customize precision structural components in various specifications and sizes according to customer requirements.

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