Products and Applications
SiC End Effector
- Silicon carbide end effector (SiC robotic arm) mainly functions to transport and handle wafers in semiconductor equipment.
- HuaCera® sintered silicon carbide ceramics have high purity (>99.9%), high specific stiffness, high hardness, excellent wear resistance, high density, no particle or chemical cleaning contamination in vacuum environments, good insulation, and excellent corrosion resistance, making it an ideal material for manufacturing end effector in semiconductor equipment.
- Huashuo Advanced Ceramics provides to semiconductor ceramic processors with blanks for custom-designed end effector components based on drawings.
