Products and Applications
SiC High-Temperature Furnace Tube
Features of HuaCera® SiC high-temperature furnace tubes:
- High oxidation resistance — can withstand temperatures up to 1800°C in an atmospheric environment
- High purity and density: silicon carbide content exceeds 99%, with good density, capable of withstanding high pressure and vacuum environments without contaminating materials, meeting high cleanliness process requirements
- Excellent corrosion resistance to various chemicals
- High mechanical strength, corrosion-resistant, and wear-resistant
- Outstanding thermal cycling performance
Typical applications
- Process tubes for tube furnace.
- Furnace tubes for annealing process in semiconductor.
